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Study of fabrication process of a micro electrostatic switch and its application to a micromechanical V—F converter

✍ Scribed by Xi-Qing Sun; Zhijian Li; Xinyu Zheng; Litian Liu


Book ID
108028205
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
724 KB
Volume
35
Category
Article
ISSN
0924-4247

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