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A new formulation of fringing capacitance and its application to the control of parallel-plate electrostatic micro actuators

✍ Scribed by Mehran Hosseini; Guchuan Zhu; Yves-Alain Peter

Publisher
Springer
Year
2007
Tongue
English
Weight
506 KB
Volume
53
Category
Article
ISSN
0925-1030

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