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Investigation of a Piezoelectric Driven MEMS Mirror based on Single S-shaped PZT Actuator

✍ Scribed by Kah How Koh; Takeshi Kobayashi; Huicong Liu; Chengkuo Lee

Book ID: 119355648
Publisher: Elsevier
Year: 2011
Tongue: English
Weight: 612 KB
Volume: 25
Category: Article
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2011.12.173

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