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Process modeling and simulation: boundary conditions for point defect-based impurity diffusion model

✍ Scribed by Taniguchi, K.; Shibata, Y.; Hamaguchi, C.

Book ID: 119778161
Publisher: IEEE
Year: 1990
Tongue: English
Weight: 759 KB
Volume: 9
Category: Article
ISSN: 0278-0070
DOI: 10.1109/43.62754

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