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Process development for III–V nitrides

✍ Scribed by S.J. Pearton; C.R. Abernathy; F. Ren; R.J. Shul; S.P. Kilcoyne; M. Hagerott-Crawford; J.C. Zolper; R.G. Wilson; R.G. Schwartz; J.M. Zavada

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 699 KB
Volume: 38
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(95)01516-7

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