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Pressure dependence of oxide growth rate on silicon and metal silicides

✍ Scribed by L.J Terminello; J.A Yarmoff; F.M d'Heurle; F.R McFeely


Book ID
118364191
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
457 KB
Volume
243
Category
Article
ISSN
0039-6028

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