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Optimization of scandium oxide growth by high pressure sputtering on silicon

✍ Scribed by Feijoo, P.C.; Pampillón, M.A.; San Andrés, E.; Lucía, M.L.


Book ID
122480956
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
973 KB
Volume
526
Category
Article
ISSN
0040-6090

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