Chemical vapour deposition of metals and metal silicides on the internal surfaces of porous silicon

✍ Scribed by D.G. Anderson; N. Anwar; B.J. Aylett; L.G. Earwaker; M.I. Nasir; J.P.G. Farr; K. Stiebahl; J.M. Keen

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 326 KB
• Volume: 437
• Category: Article
• ISSN: 0022-328X
• DOI: 10.1016/0022-328x(92)83450-v