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Growth kinetics of thin anodic oxides of silicon and its dependence on phosphorus concentration in silicon

✍ Scribed by S.K. Sharma; B.C. Chakravarty; S.N. Singh; B.K. Das


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
214 KB
Volume
163
Category
Article
ISSN
0040-6090

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