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Preparation of titanium oxynitride thin films by reactive sputtering using air/Ar mixtures

✍ Scribed by Mu-Hsuan Chan; Fu-Hsing Lu

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 855 KB
Volume: 203
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2008.04.094

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