Preparation of oxynitride thin films of BaNb(OyN)x and LaNb(OyN2)x using reactive sputtering from multiphase powder targets

✍ Scribed by Yoel Cohen; Ilan Riess

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 606 KB
• Volume: 25
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(94)90225-9