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Preparation of thermosensitive magnetron sputtered thin films

✍ Scribed by G. Beensh-Marchwicka; E. Prociów; W. Posadowski


Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
173 KB
Volume
53
Category
Article
ISSN
0042-207X

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Preparation of MgB2 superconducting thin
✍ R. Mičunek; A. Plecenik; P. Kúš; M. Zahoran; M. Tomášek; T. Plecenik; M. Gregor; 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 383 KB

Superconductor MgB 2 thin films with thickness 200 nm were prepared on sapphire substrates by co-deposition of boron and magnesium. Precursor MgB thin films were deposited from two independent magnetron sources-boron by rf magnetron sputtering and magnesium by dc magnetron sputtering. MgB precursor