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Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system

✍ Scribed by Langford, R. M.; Huang, Y. Z.; Lozano-Perez, S.; Titchmarsh, J. M.; Petford-Long, A. K.


Book ID
126823590
Publisher
AVS (American Vacuum Society)
Year
2001
Tongue
English
Weight
594 KB
Volume
19
Category
Article
ISSN
0734-211X

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Specific site cross-sectional sample pre
✍ David M. Schraub; Raghaw S. Rai πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 993 KB

Sample preparation using focused ion beam (FIB) for transmission Electron Microscopy (TEM) analysis was reviewed. Improving the quality of FIB prepared TEM sample has been an issue in the past. A specific site cross-sectional sample preparation method has been developed using FIB milling for TEM cha