Specific site cross-sectional sample pre
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David M. Schraub; Raghaw S. Rai
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Article
📅
1998
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Elsevier Science
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English
⚖ 993 KB
Sample preparation using focused ion beam (FIB) for transmission Electron Microscopy (TEM) analysis was reviewed. Improving the quality of FIB prepared TEM sample has been an issue in the past. A specific site cross-sectional sample preparation method has been developed using FIB milling for TEM cha