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Preparation of SiOxNy films by reactive KrF laser ablation

✍ Scribed by Kazunori Maruyama; Yasushi Aoki; Masunori Matsumoto; Yasushi Hiroshima; Hiroshi Ohta


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
336 KB
Volume
96-98
Category
Article
ISSN
0169-4332

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