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KrF excimer laser ablation of thin Cr film on glass substrate

✍ Scribed by S.K. Lee; S.J. Na

Publisher
Springer
Year
1999
Tongue
English
Weight
415 KB
Volume
68
Category
Article
ISSN
1432-0630

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Excimer laser ablation of PZT thin films
Excimer laser ablation of PZT thin films on silicon cantilever beams
✍ Jyrki Lappalainen; Johannes Frantti; Hannu Moilanen; Seppo LeppΓ€vuori πŸ“‚ Article πŸ“… 1995 πŸ› Elsevier Science 🌐 English βš– 474 KB

Laser ablation was used to realise piezoelectric films for use in a low-voltage cantilever bimorph actuator structure. Neodymiumdoped lead zirconium titanate (PZT) targets were ablated by a pulsed \(\mathrm{XeCl}\) excimer laser (wavelength \(308 \mathrm{~nm}\) ). The deposited films showed a better