Cubic boron nitride deposition on silicon substrates at room temperature by KrF excimer laser ablation of h-BN

✍ Scribed by L.B. Zuev; V.I. Danilov; S.A. Barannikova; I.Y. Zykov

• Publisher: Springer
• Year: 2000
• Tongue: English
• Weight: 78 KB
• Volume: 70
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390050032