Laser ablation was used to realise piezoelectric films for use in a low-voltage cantilever bimorph actuator structure. Neodymiumdoped lead zirconium titanate (PZT) targets were ablated by a pulsed \(\mathrm{XeCl}\) excimer laser (wavelength \(308 \mathrm{~nm}\) ). The deposited films showed a better
β¦ LIBER β¦
Excimer laser ablation of thin gold films on a
β Scribed by X. Zhang; S.S. Chu; J.R. Ho; C.P. Grigoropoulos
- Publisher
- Springer
- Year
- 1997
- Tongue
- English
- Weight
- 460 KB
- Volume
- 64
- Category
- Article
- ISSN
- 1432-0630
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