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Preparation of polycrystalline Ti-Al-O films by magnetron sputtering ion plating: constitution, structure and morphology

✍ Scribed by A. v. Richthofen; Rainer Cremer; Ralph Domnick; Dieter Neuschütz


Publisher
Springer
Year
1997
Tongue
English
Weight
445 KB
Volume
358
Category
Article
ISSN
1618-2650

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