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Preparation of In2O3:Sn (ITO) Films by Electron Beam Deposition

✍ Scribed by Bich, V. T. ;Dinh, N. N. ;Hoai, T. X. ;Hoang, N. H. ;Hong, L. V. ;Mien, V. D.

Publisher
John Wiley and Sons
Year
1987
Tongue
English
Weight
168 KB
Volume
102
Category
Article
ISSN
0031-8965

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## Abstract Ti‐doped In~2~O~3~ (ITiO) thin films have been prepared by electron beam physical vapour deposition (EB‐PVD). Their optical and electrical properties are studied for the obtained compositions. After oxygen annealing all samples show excellent optical transparence; additionally, maximum