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Optical and transport properties of Ti-doped In2O3 thin films prepared by electron beam physical vapour deposition

✍ Scribed by Sánchez-Marcos, J. ;Ochando, I. M. ;Galindo, R. Escobar ;Martínez-Morillas, R. ;Prieto, C.

Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
480 KB
Volume
207
Category
Article
ISSN
0031-8965

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✦ Synopsis

Abstract

Ti‐doped In~2~O~3~ (ITiO) thin films have been prepared by electron beam physical vapour deposition (EB‐PVD). Their optical and electrical properties are studied for the obtained compositions. After oxygen annealing all samples show excellent optical transparence; additionally, maximum values for conductivity are obtained for samples with titanium contents near 6 at.%, with typical resistivity values of 4 × 10^−5^ Ω cm. Finally, the band‐gap energy evolution is studied for the set of samples.

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