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Preparation of highly transparent conductive Al-doped ZnO thin films and annealing effects on properties

✍ Scribed by Xue-Ran Deng; Hong Deng; Min Wei; Jin-Ju Chen

Publisher
Springer US
Year
2011
Tongue
English
Weight
345 KB
Volume
23
Category
Article
ISSN
0957-4522

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## Abstract Epitaxial ZnO and Al‐doped ZnO (AZO) thin films were grown on (0001)‐sapphire substrates using pulsed laser deposition. The photoluminescence spectrum of the highly conductive (1.3 × 10^3^ S cm^βˆ’1^), as‐grown AZO shows a poor near band edge (NBE) emission (3.30 eV) and no deep level emi