Photoluminescence and electrical properties of epitaxial Al-doped ZnO transparent conducting thin films
β Scribed by Noh, Jun Hong ;Cho, In-Sun ;Lee, Sangwook ;Cho, Chin Moo ;Han, Hyun Soo ;An, Jae-Sul ;Kwak, Chae Hyun ;Kim, Jin Yong ;Jung, Hyun Suk ;Lee, Jung-Kun ;Hong, Kug Sun
- Publisher
- John Wiley and Sons
- Year
- 2009
- Tongue
- English
- Weight
- 400 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0031-8965
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β¦ Synopsis
Abstract
Epitaxial ZnO and Alβdoped ZnO (AZO) thin films were grown on (0001)βsapphire substrates using pulsed laser deposition. The photoluminescence spectrum of the highly conductive (1.3βΓβ10^3^βSβcm^β1^), asβgrown AZO shows a poor near band edge (NBE) emission (3.30βeV) and no deep level emission at room temperature. In addition, the peak (3.386βeV) for the free excitons of AZO showed thermal quenching behavior with two activation energies (38.2 and 10.0βmeV). The poor NBE emission is attributed to the nonradiative recombination center created by Al doping. Highly conductive (6.0βΓβ10^2^βSβcm^β1^) and intense NBE emitting AZO films could be achieved by the reduction of the nonradiative recombination centers through hydrogen annealing.
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