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Preparation of CuIn5S8 thin films by single-source organometallic chemical vapour deposition

✍ Scribed by Ryôki Nomura; Yasuharu Seki; Haruo Matsuda


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
245 KB
Volume
209
Category
Article
ISSN
0040-6090

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Thin films of CdS were grown by low-pressure metalorganic chemical vapour deposition (LP-MOCVD, 10 72 Torr) on GaAs(100) and borosilicate glass using the novel single-source precursor bis(diethylmonothiocarbamato)cadmium(II). The deposition of CdS was observed at substrate temperatures of 300 8C and