✦ LIBER ✦
Single-source organometallic chemical vapour deposition process for sulphide thin films: Introduction of a new organometallic precursor BunIn(SPri)2 and preparation of In2S3 thin films
✍ Scribed by Ryôki Nomura; Kazuhisa Konishi; Haruo Matsuda
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 418 KB
- Volume
- 198
- Category
- Article
- ISSN
- 0040-6090
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