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Preparation of crystalline carbon nitride films on silicon substrate by chemical vapor deposition

✍ Scribed by Woo, H.K.; Zhang, Yafei; Lee, S.T.; Lee, C.S.; Lam, Y.W.; Wong, K.W.

Book ID: 123299878
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 659 KB
Volume: 6
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(96)00615-2

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