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Heteroepitaxial silicon-carbide nitride films with different carbon sources on silicon substrates prepared by rapid-thermal chemical-vapor deposition

✍ Scribed by Shyh-Fann Ting; Yean-Kuen Fang; Wen-Tse Hsieh; Yong-Shiuan Tsair; Cheng-Nan Chang; Chun-Sheng Lin; Ming-Chun Hsieh; Hsin-Che Chiang; Jyh-Jier Ho

Publisher: Springer US
Year: 2002
Tongue: English
Weight: 591 KB
Volume: 31
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-002-0119-2

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