✦ LIBER ✦
High mobility β-SiC epilayer prepared by low-pressure rapid thermal chemical vapor deposition on a (100) silicon substrate
✍ Scribed by J.D. Hwang; Y.K. Fang; Y.J. Song; D.N. Yaung
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 280 KB
- Volume
- 272
- Category
- Article
- ISSN
- 0040-6090
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