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Preparation of carbon nitride film by cryogenic laser processing

✍ Scribed by T. Sato; A. Narazaki; Y. Kawaguchi; H. Niino

Book ID
106019472
Publisher
Springer
Year
2004
Tongue
English
Weight
406 KB
Volume
79
Category
Article
ISSN
1432-0630

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Carbon nitride films prepared by guanazo
Carbon nitride films prepared by guanazole laser ablation in ammonia atmosphere
✍ R. Soto; P. GonzΓ‘lez; F. LusquiΓ±os; J. Pou; B. LeΓ³n; M. PΓ©rez-Amor πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 353 KB

Carbon nitride thin films were deposited using an ArF excimer laser to ablate a target of 3,5 diamino 1,2,4 triazole (guanazole) in a reactive atmosphere of ammonia. Films were obtained at room temperature onto crystalline silicon and aluminium substrates. The dependence of the film properties on th