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Excimer laser ablation process characteristics for carbon nitride and diamond-like films preparation

✍ Scribed by S Aoqui; K Ebihara; T Ikegami

Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 396 KB
Volume: 30
Category: Article
ISSN: 1359-8368
DOI: 10.1016/s1359-8368(99)00031-1

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