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Preparation of Bi, Ga-substituted Garnet Films on Glass Substrates by RF Sputtering I

✍ Scribed by Utsugi, K.; Gomi, M.; Abe, M.


Book ID
119818294
Publisher
Institute of Electrical and Electronics Engineers
Year
1987
Weight
268 KB
Volume
2
Category
Article
ISSN
0882-4959

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## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec