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Preparation of SrTiO3 Films on sapphire substrate by RF magnetron sputtering

✍ Scribed by VE Loginov; EK Hollmann; AB Kozyrev; AM Prudan

Book ID
108390434
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
285 KB
Volume
51
Category
Article
ISSN
0042-207X

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## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec