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Preparation of Bi, Ga-substituted Garnet Films on Glass Substrates by RF Sputtering II

✍ Scribed by Gomi, M.; Utsugi, R.; Abe, M.

Book ID
119818269
Publisher
Institute of Electrical and Electronics Engineers
Year
1987
Weight
866 KB
Volume
2
Category
Article
ISSN
0882-4959

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## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec