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Preparation of Al2O3 films by a new CVD process combining plasma and accelerated ion beams

✍ Scribed by Hiroshi Nakai; Hajime Kuwahara; Joji Shinohara; Tatsumi Kawaratani; Tadashi Sassa; Yuji Ikegami

Book ID: 113287442
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 417 KB
Volume: 112
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)01428-4

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