Surface morphology and resistivity of aluminum oxide films prepared by plasma CVD combined with ion beam irradiation

✍ Scribed by H. Nakai; J. Shinohara; T. Sassa; Y. Ikegami

• Book ID: 114168594
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 318 KB
• Volume: 121
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(96)00694-5