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Preparation of Al2O3 thin films by ion-beam-induced CVD: structural effects of the bombardment with accelerated ions

✍ Scribed by A. Caballero; D. Leinen; A. Fernandez; A.R. González-Elipe

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
477 KB
Volume
80
Category
Article
ISSN
0257-8972

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