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Preparation of a CVD thin film by an atmospheric pressure low temperature surface discharge plasma torch

โœ Scribed by Kuwabara, Atsushi; Kuroda, Shin-ichi; Kubota, Hitoshi


Book ID
121437755
Publisher
Institute of Physics
Year
2006
Tongue
English
Weight
512 KB
Volume
15
Category
Article
ISSN
0963-0252

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