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Preparation and properties of reactive-sputtered amorphous CNx films

✍ Scribed by Naoyuki Takada; Kenta Arai; Shoji Nitta; Shuichi Nonomura

Book ID: 108418390
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 351 KB
Volume: 113-114
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(96)00772-6

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