Polycrystalline Zn 3 N 2 films are prepared on Si and quartz glass substrates by RF magnetron sputtering at room temperature. The structural and optical properties are studied by X-ray diffraction and double beam spectrophotometer, respectively. X-ray diffraction indicates that the Zn 3 N 2 films de
β¦ LIBER β¦
Preparation and optical transmittance of titanium hydride (deutende) films by rf reactive sputtering
β Scribed by Setsuo Nakao; Kazuo Saitoh; Tatsuya Hirahara; Masami Ikeyama; Masato Tazawa; Ping Jin; Hiroaki Niwa; Seita Tanemura; Yoshiko Miyagawa; Soji Miyagawa; Kyoichiro Yasuda
- Book ID
- 114086668
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 417 KB
- Volume
- 343-344
- Category
- Article
- ISSN
- 0040-6090
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