Preparation and characterization of polycrystalline anatase and rutile TiO2 thin films by rf magnetron sputtering
โ Scribed by L Miao; P Jin; K Kaneko; A Terai; N Nabatova-Gabain; S Tanemura
- Book ID
- 108418023
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 515 KB
- Volume
- 212-213
- Category
- Article
- ISSN
- 0169-4332
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๐ SIMILAR VOLUMES
TiO 2 thin films were deposited on stainless steel substrates by radio frequency (RF) magnetron sputtering. The process conditions, including RF power, oxygen partial pressure, and temperature of substrate, were varied systematically. The deposited titanium dioxide films consisted of polycrystalline
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