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Microstructure and bactericidal ability of photocatalytic TiO2 thin films prepared by rf helicon magnetron sputtering

✍ Scribed by Lei Miao; Sakae Tanemura; Yoichi Kondo; Misao Iwata; Shoichi Toh; Kenji Kaneko

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
473 KB
Volume
238
Category
Article
ISSN
0169-4332

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Ag nanostructures on TiO 2 films were deposited by RF magnetron sputtering under variable deposition parameters, such as DC potential, RF-power and total pressure. The concentration, shape, and distribution of the deposited nanostructures and continuous Ag films on thin films of TiO 2 can be tailore