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Preparation and characterization of high-k aluminium nitride (AlN) thin film for sensor and integrated circuits applications

✍ Scribed by J. F. Souza; M. A. Moreira; I. Doi; J. A. Diniz; P. J. Tatsch; J. L. Gonçalves

Book ID: 112182322
Publisher: John Wiley and Sons
Year: 2012
Tongue: English
Weight: 355 KB
Volume: 9
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.201100461

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