Preparation and properties of tantalum pentoxide (Ta2O5) thin films for ultra large scale integrated circuits (ULSIs) application – A review

✍ Scribed by S. Ezhilvalavan; T. Y. Tseng

• Book ID: 110271329
• Publisher: Springer US
• Year: 1999
• Tongue: English
• Weight: 386 KB
• Volume: 10
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1023/a:1008970922635