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Predeposition plasma treatment of InSb surface in pecvd SiO2-InSb Structures

✍ Scribed by E.P. Valcheva; K.G. Germanova

Book ID: 119124234
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 295 KB
Volume: 7
Category: Article
ISSN: 0167-577X
DOI: 10.1016/0167-577x(89)90054-2

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