Characterization of interface electrical properties in SiO2/InSb metal/insulator/semiconductor structures prepared by plasma-enhanced chemical vapour deposition

✍ Scribed by K.G. Germanova; E.P. Valcheva

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 408 KB
• Volume: 148
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(87)90317-8