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Precision assembly of a miniaturized wire deflector for electron-beam lithography

✍ Scribed by Risse, Stefan; Damm, Christoph; Hornaff, Marcel; Kamm, Andreas; Mohaupt, Matthias; Eberhardt, Ramona; Schmidt, Ingo; Ramm, Roland; Kühmstedt, Peter; Notni, Gunther; Döring, Hans-Joachim; Elster, Thomas; Kirschstein, Ulf Carsten; Schenk, Christoph

Book ID: 122943796
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 666 KB
Volume: 97
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2012.04.014

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