✦ LIBER ✦
Design of a non-equisectored 20-electrode deflector for e-beam lithography using a field emission electron beam
✍ Scribed by E-R Weidlich
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 371 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0167-9317
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