✦ LIBER ✦

A new type of quadrupole correction lens for electron-beam lithography

✍ Scribed by Shigeo Okayama

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Proxy — A new approach for proximity cor

✍ V.V. Aristov; A.I. Erko; B.N. Gaifullin; A.A. Svintsov; S.I. Zaitsev; R.R. Jede; 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 315 KB

Determination of proximity effect correc

✍ M.G. Rosenfield; S.J. Wind; W.W. Molzen; P.D. Gerber 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 562 KB

Evaluation of a novel design for an elec

✍ L.R. Burns; J.D. Bouas; S. Matteson; D.L. Weathers 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 829 KB

Implementation of electron beam grey sca

✍ Jens Bolten; Thorsten Wahlbrink; Mathias Schmidt; Heinrich D.B. Gottlob; Heinric 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 661 KB

Determination of the electron beam irrad

✍ K. Zarbout; G. Moya; A. Kallel 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 242 KB

New exposure method for SR lithography:

✍ Yukihiko Maejima; Naoki Awaji 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 275 KB