✦ LIBER ✦
New exposure method for SR lithography: Combination of scanning mirror and electron beam wobbling
✍ Scribed by Yukihiko Maejima; Naoki Awaji
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 275 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
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