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Design and performance of shaping deflectors for variably shaped electron beam lithography

โœ Scribed by Kang Niankan; Jiang Junji; Wu Wei; Huang Lanyou; Wu Mingjun


Book ID
112929105
Publisher
SP Science Press
Year
1990
Tongue
English
Weight
511 KB
Volume
7
Category
Article
ISSN
0217-9822

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